CTF-Glorysoft (Shanghai) Co.,Ltd.

Digital Equipment Platform

The Digital Equipment Platform utilizes component-based, script-driven, and modular architecture to empower advanced equipment manufacturers in developing high-performance automated control systems, covering equipment software suites and simulation solutions.

Core solutions include: CTF, PDS, iEQ.

CTF (Cluster Tool Framework)

CTF is Glorysoft's proprietary semiconductor equipment software platform, providing equipment manufacturers with efficient, flexible, and scalable software solutions.

Platform Functions

Software Features

Platform Functions

·GUI - Graphical User Interface & Configuration Customization

·CTC - Cluster Tool Controller / Scheduling, supporting customization

·PM - Process Module

·FA - Factory Automation (GEM/GEM300)

·CM - Cassette Module Unit

·RCP - Recipe Management

·LPRC - Remote Procedure Call

·HIST - History Logging

·ALARM - Alarm Handling

·LOG - Log Management

Software Characteristics

Characteristic 1

Supporting dual-platform deployment on Windows and Linux. The Windows platform supports rapid iteration and multi-functional development, while the Linux platform offers higher security, aligns with open-source software policies, and meets varied customer requirements.

Characteristic 2

Utilizing multi-node deployment to effectively distribute performance loads, seamlessly handling big data scenarios and supporting multi-control system coordination with excellent scalability.

Characteristic 3

Functional components are designed as independent modules supporting agile development with standard features that can be customized to customer specifications.

Characteristic 4

Capable of dynamically dispatching various drivers and unit modules to adapt to equipment models from different semiconductor manufacturers, integrating customer-proprietary features to deliver customized solutions.

Product Advantages

增强兼容性

CTF's software communication bus architecture supports plug-and-play for equipment sensors, significantly reducing system complexity.

应用生态

Fully compatible with Linux and Windows cross-platform applications, broadening client reach.

终端验证实效

Successfully deployed and running stably in multiple 300mmes wafer fabs, accumulating numerous real-world cases that fully verify its reliability and practical utility.
iEQ（Intelligent Equipment Communication)

iEQ is an independently developed core industrial communication solution specifically designed to provide high-efficiency, stable equipment communication and data exchange services for pan-semiconductor enterprises.

Industry Pain Points

Product Empowerment Value

Industry Pain Points

Pain Point 1

Developing communications between PLCs and host systems is highly difficult, incurring high labor and time costs.

Pain Point 2

Using third-party hardware involves high costs and poor adaptation/compatibility, failing to meet market demands.

Pain Point 3

Lacking unified standards and domain experience in automation.

Product Empowerment Value

Value 1

Supporting major PLC vendors covering mainstream communication protocols.

Value 2

Providing standard SECS/GEM interfaces for seamless integration with host systems.

Value 3

Uninterrupted stable operation with high data transmission reliability.

Product Advantages

Simple plug-and-play installation; configured via Web Client, offering powerful functions, flexible configuration, and real-time execution.

Deeply integrated with equipment, offering standard SECS/GEM interfaces for direct seamless integration with host systems like EAP and MES, realizing information transmission, data collection, and process control.

Fully compatible with SECS/GEM standard functional interfaces, running stably 24/7 with high data transmission performance.

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