Glorysoft’s advanced metrology solution has recently been successfully deployed on domestic Critical Dimension Scanning Electron Microscope (CD SEM) and delivered to customers together with the complete equipment. This marks Glorysoft’s strategic expansion from "production line automation software" to "core metrology solutions", and represents a crucial step toward full independence of domestic semiconductor metrology equipment integrating "hardware, software and algorithms".
CD SEM: Urgent Demand for Localization of the "Nanometer Ruler" in Semiconductor Manufacturing
CD SEM is an indispensable core metrology equipment for advanced semiconductor processes, widely adopted for nanoscale dimension measurement and control in critical processes such as lithography and etching. For a long time, the high-end CD SEM market has been dominated by overseas manufacturers. Achieving breakthroughs in localization carries great strategic significance for enhancing the independent controllability of China’s semiconductor industrial chain.
Glorysoft’s Advanced Metrology Solution: Three Core Capabilities
In this joint research initiative, Glorysoft developed a fully self-developed customized advanced metrology solution for CD SEM benchmarking leading international equipment. Its core strengths are reflected in three dimensions:
Establish a highly reliable equipment control and scheduling hub
Enable precise coordinated control of modules including vacuum systems, precision stages and electron beams, guaranteeing high repeatability and high throughput of the equipment during nanometer-level measurement tasks.
Deliver fully automated metrology workflows and data analysis
Support creation and management of complex measurement recipes, enable automatic full-wafer measurement workflows, and embed efficient image processing and edge detection algorithms to accurately output critical dimension data.
Seamlessly integrate with fab intelligent manufacturing ecosystem
Equipped with communication interfaces compliant with international semiconductor standards (SECS/GEM), it enables data exchange and remote control with the Manufacturing Execution System (MES), allowing seamless integration into fully automated 12-inch wafer fabs.
The development of high-end metrology equipment relies on deep coordination between hardware and software. Glorysoft’s full-stack metrology solution covers a complete capability stack ranging from underlying algorithms, equipment control and image processing to interconnection with factory systems. It realizes high-precision motion control, automated measurement workflows, real-time image processing and seamless connectivity with wafer fab systems.
Looking ahead, Glorysoft will continue to deepen industrial collaboration in the field of advanced metrology. Leveraging its semiconductor customer resources and service network, Glorysoft will actively promote the verification and rollout of domestic advanced metrology solutions in more wafer fabs, jointly building an independent ecosystem for domestic high-end metrology equipment.
